Author:
Inoue Fumihiro,Jourdain Anne,Peng Lan,Phommahaxay Alain,De Vos Joeri,Rebibis Kenneth June,Miller Andy,Sleeckx Erik,Beyne Eric,Uedono Akira
Funder
IMEC’s Industrial Affiliation Program
Harold Philipsen
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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5. Grinding of silicon wafers: a review from historical perspectives;Pei;Int. J. Mach. Tools Manuf.,2008
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