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Three dimensional measurement of nanostructures by single event TOF-RBS with nuclear nano probe

  • Published:2011-10 Issue:20 Volume:269 Page:2233-2236
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Abo Satoshi,Kumano Shunya,Azuma Takayuki,Sugimoto Ryota,Koresawa Kohei,Murakami Katsuhisa,Wakaya Fujio,Takai Mikio

Funder

the Ministry of Education, Science, Sport and Culture, and STARC

The Japan Science and Technology Agency

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tertiary electrons in single-event time-of-flight Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-10

2. Improvement of depth resolution and detection efficiency by control of secondary-electrons in single-event three-dimensional time-of-flight Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04

3. Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption;Applied Physics Express;2014-09-30

4. Study on spatial resolution of three-dimensional analysis by full count TOF-RBS with beryllium nanoprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02
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