Study on spatial resolution of three-dimensional analysis by full count TOF-RBS with beryllium nanoprobe
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
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1. Roadmap for focused ion beam technologies;Applied Physics Reviews;2023-12-01
2. Tertiary electrons in single-event time-of-flight Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-10
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4. Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry;Ultramicroscopy;2016-03
5. Backscattering Spectrometry in the Helium Ion Microscope: Imaging Elemental Compositions on the nm Scale;Helium Ion Microscopy;2016
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