Improvement of depth resolution and detection efficiency by control of secondary-electrons in single-event three-dimensional time-of-flight Rutherford backscattering spectrometry-Reference-Cited by-同舟云学术

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Improvement of depth resolution and detection efficiency by control of secondary-electrons in single-event three-dimensional time-of-flight Rutherford backscattering spectrometry

Published:2015-04 Issue: Volume:348 Page:29-33
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Abo Satoshi,Hamada Yasuhisa,Seidl Albert,Wakaya Fujio,Takai Mikio

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference27 articles.

1. Two-dimensional photonic crystals produced by additive nanolithography with electron beam-induced deposition act as filters in the infrared

2. Fabrication of Nano Electron Source Using Beam-Assisted Process

3. Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition

4. Characteristics of nano electron source fabricated using beam assisted process

5. International Technology Roadmap for Semiconductors 2013 Edition. .

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tertiary electrons in single-event time-of-flight Rutherford backscattering spectrometry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-10

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