Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM-Reference-Cited by-同舟云学术

Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM

Published:2006-01 Issue:1 Volume:30 Page:13-22
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Misumi Ichiko,Gonda Satoshi,Kurosawa Tomizo,Azuma Yasushi,Fujimoto Toshiyuki,Kojima Isao,Sakurai Toshihisa,Ohmi Tadahiro,Takamasu Kiyoshi

Publisher

Elsevier BV

Subject

General Engineering

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