A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology-Reference-Cited by-同舟云学术

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A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology

Published:2022 Issue: Volume:71 Page:1-9
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Wang Chen¹^ORCID,Meng Xianyu¹^ORCID,Krolczyk Grzegorz²^ORCID,Wei Heming³^ORCID

Affiliation:

1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai, P. R. China

2. Faculty of Mechanical Engineering, Opole University of Technology, Opole, Poland

3. Key Laboratory of Specialty Fiber Optics and Optical Access Networks, School of Communication and Information Engineering, Shanghai University, Shanghai, China

Funder

Shanghai Sailing Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/19/9717300/09885173.pdf?arnumber=9885173

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel algorithm for three-dimensional shape reconstruction for microscopic objects based on shape from focus;Optics & Laser Technology;2024-01

2. Wafer Surface Reconstruction Based on Shape From Focus;IEEE Access;2024

3. Phase-based reconstruction optimization method for digital holographic measurement of microstructures;Applied Optics;2023-06-01

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