Abstract
AbstractWith the progress in nanotechnology, the importance of nanodimensional standards is increasing. Realizing nanodimensional standards requires multiple types of high-precision microscopy techniques. The National Metrology Institute of Japan (NMIJ), one of the research domains in the National Institute of Advanced Industrial Science and Technology (AIST), is developing nanodimensional standards using atomic force, transmission electron, and scanning electron microscopes. The current status of nanodimensional standards in NMIJ is introduced herein.
Funder
new energy and industrial technology development organization
japan society for the promotion of science
Publisher
Springer Science and Business Media LLC
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Materials Science (miscellaneous)
Cited by
4 articles.
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