A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEMs
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1144642
Reference4 articles.
1. SEM-based System For Calibration Of Linewidth SRMs For The IC industry
2. Submicrometer Dimensional Metrology In The Scanning Electron Microscope
3. A metrological electron microscope system for microfeatures of very large scale integrated circuits
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