A metrological electron microscope system for microfeatures of very large scale integrated circuits-Reference-Cited by-同舟云学术

A metrological electron microscope system for microfeatures of very large scale integrated circuits

Author:

Hatsuzawa Takeshi,Toyoda Kouji,Tanimura Yoshihisa

Publisher

AIP Publishing

Subject

Instrumentation

Link

Reference10 articles.

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modern Scanning Electron Microscopy. 3. Electron Probe;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2024-02

2. Modern Scanning Electron Microscopy. 2. Test Objects for Scanning Electron Microscopy;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12

3. Modern Scanning Electron Microscopy. 2. Test objects for Scanning Electron Microscopy;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2023-12-01

4. Modern Scanning Electron Microscopy. 1. Secondary Electron Emission;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-06

5. Modern Scanning Electron Microscopy. 1. Secondary Electron Emission;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2023-05-01