Modern Scanning Electron Microscopy. 1. Secondary Electron Emission

Abstract

The development of modern technologies, including nanotechnology, is based on application of diagnostic methods of objects used in technologies processes. For this purpose most perspective are methods realized in a scanning electron microscope. Thus one of basic methods is the measurement of linear sizes of relief structures of micrometer and nanometer ranges used in micro- and nanoelectronic. In a basis of a scanning electron microscope job the secondary electronic issue of firm body lays. However, practically all researches were spent on surfaces, which relief was neglected. The review of theoretical and experimental materials to researches of a secondary electron emission is given. Practically all known laws are checked up in experiments and have received the physical explanation. However, the application of a secondary electronic emission in a scanning electron microscopy, used in micro- both nanoelectronic and nanotechnology, requires knowledge of laws, which are shown on relief surfaces. Is demonstrated, what laws can be applied in a scanning electron microscope to measurement of linear sizes of relief structures. Is judged necessity of an influence study of a surface relief on a secondary electron emission.