Modern Scanning Electron Microscopy. 2. Test objects for Scanning Electron Microscopy

Abstract

The review of the test objects intended for calibration of scanning electron microscopes and researches to secondary electronic emission of a relief surface of a solid state in scanning electron microscope is carried out. The test objects are divided on two parameters – kind of a relief and structure of a relief. By the form of relief the test objects are divided on single, pitch and periodic. On a structure of a relief of the test objects are divided into objects with a rectangular structure and objects with a trapezoid structure with the large and small corners of an inclination of lateral walls. The examples of such the test objects are given. Their characteristics and methods of certification of parameters are described. The advantages and lacks of the test objects are considered. Is shown, that the best characteristics have the tests objects representing pitch structures consisting of trapezoid trenches with the large corners of an inclination of lateral walls. The test objects are created in monosilicon with of a surface orientation by {100} by method liquid anisotropic etching of silicon. These test objects allow defining all characteristics scanning electron microscopes, influencing on measurement of the linear sizes of relief structures used in microelectronics and nanotechnology. With their help it is possible to carry out correlation measurements, which raise accuracy of calibration scanning electron microscopes up to ten times.