SEM-based System For Calibration Of Linewidth SRMs For The IC industry
Author:
Affiliation:
1. National Bureau of Standards (United States)
Publisher
SPIE
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A test object with a line width less than 10 nm for scanning electron microscopy;Measurement Techniques;2008-08
2. A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEMs;Review of Scientific Instruments;1994-08
3. MICROLITHOGRAPHY METROLOGY;Handbook of Vlsi Microlithography;1991
4. Low‐profile high‐efficiency microchannel‐plate detector system for scanning electron microscopy applications;Review of Scientific Instruments;1990-06
5. The relationship between accelerating voltage and electron detection modes to linewidth measurement in an SEM;Scanning;1988
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