Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/53/i=6S/a=06JM03/pdf
Reference31 articles.
1. Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
2. Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
3. Influence of ICP Etching Damage on the Brittle-Fracture Strength of Single-Crystal Silicon
4. Microscale material testing of single crystalline silicon: process effects on surface morphology and tensile strength
5. Effect of crystal orientation on fracture strength and fracture toughness of single crystal silicon
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1. Mechanical reliability of silicon microstructures;Journal of Micromechanics and Microengineering;2021-12-09
2. Finishing of Rough Sidewalls of a Silicon-on-Insulator Nano-Optical Waveguide Using Laser Surface Melting;Strength of Materials;2021-07
3. Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film;Applied Surface Science;2018-06
4. Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method;Japanese Journal of Applied Physics;2017-04-20
5. Fracture behavior of single crystal silicon with thermal oxide layer;Engineering Fracture Mechanics;2016-09
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