Abstract
Abstract
In this article, an overview of the mechanical reliability of silicon microstructures for micro-electro-mechanical systems is given to clarify what we now know and what we still have to know about silicon as a high-performance mechanical material on the microscale. Focusing on the strength and fatigue properties of silicon, attempts to understand the reliability of silicon and to predict the device reliability of silicon-based microstructures are introduced. The effective parameters on the strength and the mechanism of fatigue failure are discussed with examples of measurement data to show the design guidelines for highly reliable silicon microstructures and devices.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献