Fracture behavior of single crystal silicon with thermal oxide layer-Reference-Cited by-同舟云学术

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Fracture behavior of single crystal silicon with thermal oxide layer

Published:2016-09 Issue: Volume:163 Page:523-532
ISSN:0013-7944
Container-title:Engineering Fracture Mechanics
language:en
Short-container-title:Engineering Fracture Mechanics

Author:

Tsuchiya Toshiyuki,Miyamoto Kenji,Sugano Koji,Tabata Osamu

Funder

Ministry of Education, Culture, Sports, Science and Technology

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference14 articles.

1. Influence of ICP etching damage on the brittle-fracture strength of single-crystal silicon;Izumi;Zairyo/J Soc Mater Sci,2007

2. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films;Tsuchiya;J Microelectromech Syst,1998

3. The mechanical strength of polysilicon films: Part 1. The influence of fabrication governed surface conditions;Chasiotis;J Mech Phys Solids,2003

4. Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM;Shikida;Microsyst Technol,2014

5. Hajika R, Yoshida S, Makishi W, Kanamori Y, Tanaka S, Esashi M. Mechanical strengthening of silicon torsion bar of MEMS scanning mirror by hydrogen anneal. In: The 26th international conference on micro electro mechanical systems, Taipei, Taiwan, January 20–24 2013. p. 425–8.

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1. Investigation of fracture toughness and microstructure of micro-scaled multilayer-DLC/silicon system via pillar splitting method;Ceramics International;2023-12

2. Mechanical reliability of silicon microstructures;Journal of Micromechanics and Microengineering;2021-12-09

3. Effect of alternating a-C:H multilayer full coating on fracture behavior of single-crystal silicon-based microstructure in tensile and toughness tests;Materials Science and Engineering: A;2021-10

4. Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film;Surface and Coatings Technology;2021-01

5. Tensile Strength of Silicon Nanowires Batch-Fabricated into Electrostatic MEMS Testing Device;Applied Sciences;2018-05-28

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