Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film
Author:
Funder
Kyoto University
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference47 articles.
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5. Substrate bias voltage tailoring the interfacial chemistry of a-SiCx: H:A surprising improvement in adhesion of a-C: H thin films deposited on ferrous alloys controlled by oxygen;Crespi;ACS Appl. Mater. Interfaces,2019
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