Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference32 articles.
1. Diamond and diamond-like carbon MEMS;Luo;J. Micromech. Microeng.,2007
2. Tribology of diamond like carbon and related materials: an updated review;Grill;Surf. Coatings Technol.,1997
3. Diamond-like amorphous carbon;Robertson;Mater. Sci. Eng. R,2002
4. 60 years of DLC coatings: historical highlights and technical review of cathodic arc processes to synthesize various DLC types, and their evolution for industrial applications;Vetter;Surf. Coatings Technol.,2014
5. Elimination of strength degrading effects caused by surface microdefect: A prevention achieved by silicon nanotexturing to avoid catastrophic brittle fracture;Kashyap;Sci. Rep.,2015
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