Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon-Reference-Cited by-同舟云学术

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Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon

Published:2013-06 Issue: Volume: Page:
ISSN:
Container-title:2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
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Author:

Uesugi A.,Hirai Y.,Sugano K.,Tsuchiya T.,Tabata O.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6599514/6626676/06627175.pdf?arnumber=6627175

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR;Journal of Microelectromechanical Systems;2022-02

2. XFEM modeling for curved fracture in the anisotropic fracture toughness medium;Computational Mechanics;2018-09-05

3. Crack forbidden area in the anisotropic fracture toughness medium;Extreme Mechanics Letters;2018-07

4. Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding <110> and <100> single crystal silicon beams;Microsystem Technologies;2015-01-14

5. Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment;Japanese Journal of Applied Physics;2014-05-08

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