Contact printing for direct metallic pattern transfer based on pulsed infrared laser heating
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Imprint Lithography with 25-Nanometer Resolution
2. Imprint lithography with sub-10 nm feature size and high throughput
3. Nanoscale silicon field effect transistors fabricated using imprint lithography
4. Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels
5. Step and flash imprint lithography: a new approach to high-resolution patterning
Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Fabrication of mechanically reliable micrometric scale conductive pattern by direct pattern transfer using UV photopolymer penetration;Journal of Micromechanics and Microengineering;2021-01-26
2. Direct metallic nanostructures transfer by flexible contact UV-curable nano-imprint lithography;Applied Physics Express;2019-08-28
3. Anti-reflection nano-structures fabricated on curved surface of glass lens based on metal contact printing lithography;Microelectronic Engineering;2019-06
4. Multilayer lift-off process for sub-15-nm patterning by step-and-repeat ultraviolet nanoimprint lithography;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-09-05
5. Tuning the Shear Modulus of Single-Walled Carbon Nanotube by Feeding Van Der Waals Molecules;Key Engineering Materials;2014-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3