Nanoscale silicon field effect transistors fabricated using imprint lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119426
Reference4 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Nanoimprint lithography
3. Single electron and hole quantum dot transistors operating above 110 K
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