Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1600505
Reference8 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
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4. Pattern transfer to silicon by microcontact printing and RIE
5. Step and flash imprint lithography: a new approach to high-resolution patterning
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