Author:
Bartek M,Wolffenbuttel R F
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
26 articles.
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3. Vapor-phase etch processes for silicon MEMS;Handbook of Silicon Based MEMS Materials and Technologies;2020
4. Vapor Phase Etch Processes for Silicon MEMS;Handbook of Silicon Based MEMS Materials and Technologies;2015
5. Comparative study of various release methods for gold surface micromachining;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-02-05