Author:
Frazier A.Bruno,Ahn Chong H.,Allen Mark G.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference40 articles.
1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process);Becker;Microelectronic Eng.,1986
2. W. Ehrfeld, P. Bley, F. Gotz, P. Hagmann, A. Maner, J. Mohr, H.O. Moser, D. Munchmeyer, W. Schelb, D. Schmidt and E.W. Becker, Fabrication of microstructures using the LIGA process, Proc. 1987 IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, USA, Nov. 9–11, 1987
3. H. Guckel, T.R. Christenson, K.J. Skrobis, D.D. Denton, B. Choi, E.G. Lovell, J.W. Lee, S.S. Bajikar and T.W. Chapman, Deep X-ray and UV lithographies for micromechanics, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, June 4–7, 1990, pp. 118–122
4. W. Menz, W. Backer, M. Harmening and A. Michel, The Liga technique: a novel concept for microstructures and the combination with SI-technologies by injection molding, Proc. 1991 IEEE Microelectromechanical Systems Conf., Nara, Japan, Jan. 30–Feb. 2, 1991, pp. 69–73
5. W. Ehrfeld, F. Gotz, D. Munchmeyer, W. Schelb and D. Schmidt, Liga process: sensors construction techniques via X-ray lithography, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, June 6–9, 1988, pp. 1–4
Cited by
40 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献