Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)-Reference-Cited by-同舟云学术

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

Published:1986-05 Issue:1 Volume:4 Page:35-56
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Becker E.W.,Ehrfeld W.,Hagmann P.,Maner A.,Münchmeyer D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Production of separation nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics;Becker;Naturwissenschaften,1982

2. Present status and problems of X-ray lithography;Heuberger;Festkörperprobleme/Advances in Solid State Physics,1980

3. Untersuchungen zur Abbildungsgenauigkeit der Röntgentiefenlithographie mit Synchrotronstrahlung bei der Herstellung technischer Trenndüsenelemente;Becker,1984

4. Untersuchungen zur Abbildungsgenauigkeit der Röntgentiefenlithografie mit Synchrotronstrahlung bei der Herstellung technischer Trenndüsenelemente;Münchmeyer,1984

5. V. Ghica and W. Glashauser, Verfahren für die spannungsfreie Entwicklung von bestrahlten Polmethylmethacrylat-Schicten, Pffenlegungsschrift DE 3039110 Siemens AG, Munich.

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