Author:
Turi Maria Carolina,Gelmi Ilaria,Pezzuto Raffaella
Publisher
Springer International Publishing
Reference14 articles.
1. Bartek, M., & Wolffenbuttel, R. (1998). Dry release of metal structures in oxygen plasma: Process characterization and optimization. Journal of Micromechanics and Microengineering, 8(2), 91.
2. Bagolini, A., Pakula, L., Scholtes, T., Pham, H., French, P., & Sarro, M. (2002). Polyimide sacrificial layer and novel materials for post-processing surface micromachining. Journal of Micromechanics and Microengineering, 12(4), 385.
3. Arana, R., de Mas, N., Schmidt, R., Franz, A. J., Schmidt, M. A., Jensen, K. F., & Micromech, J. (2007). Microeng., 17, 384.
4. Tasy, N., Sonnenberg, T., Jansen, H., & Legtenberg, R. (1996). Stiction in surface micromachining. J. Micromech. Microeng, 6, 385–397.
5. Legtenberg, R., Elders, J., & Elwenspoek, M., Stiction of surface micromachined structures after rinsing and drying: Model and investigation of adhesion mechanisms presented, In: International Conference on Solid-Stat.