Polyimide sacrificial layer and novel materials for post-processing surface micromachining-Reference-Cited by-同舟云学术

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Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Published:2002-06-14 Issue:4 Volume:12 Page:385-389
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Bagolini A,Pakula L,Scholtes T L M,Pham H T M,French P J,Sarro P M

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Development of surface micromachining techniques compatible with on-chip electronics

2. Silicon carbide as a new MEMS technology

3. Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

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