Development of surface micromachining techniques compatible with on-chip electronics
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference72 articles.
1. Anisotropic etching of silicon
2. Silicon as a mechanical material
3. A RESONANT‐GATE SILICON SURFACE TRANSISTOR WITH HIGH‐QBAND‐PASS PROPERTIES
4. The resonant gate transistor
5. The mirror-matrix tube: A novel light valve for projection displays
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