Comparative study of various release methods for gold surface micromachining-Reference-Cited by-同舟云学术

Comparative study of various release methods for gold surface micromachining

Published:2014-02-05 Issue:1 Volume:13 Page:013005
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Sharma Akshdeep¹,Jhanwar Prachi¹,Bansal Deepak¹,Kumar Amit¹,Kaur Maninder¹,Pandey Shilpi¹,Kumar Prem¹,Kumar Dinesh²,Rangra Kamaljit¹

Affiliation:

1. Central Electronics Engineering Research Institute, Council of Scientific and Industrial Research, Sensors and Nanotechnology Group, Pilani, Rajasthan, India

2. Kurukshetra University, Department of Electronics Science, Kurukshetra, Haryana, India

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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