Problems of sacrificial etching in the presence of aluminium interconnect-Reference-Cited by-同舟云学术

Problems of sacrificial etching in the presence of aluminium interconnect

Published:1997-07 Issue:1-3 Volume:62 Page:692-697
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Goosen J.F.L.,van DrieEnhuizen B.P.,French P.J.,Wolffenbuttel R.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. LPCVD vs. PECVD for micromechanical applications;Stoffel,1995

2. Investigation on free-standing polysilicon beams in view of their application as transducers;Linder;Sensors and Actuators,1990

3. Hinged polysiliconstructures with integrated CMOS TFT's;Pister,1992

4. Polycrystalline silicon microstructures;Howe,1985

5. CMOS foundry-based micromachining;Tilmans,1995

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and simulation of an uncooled double-cantilever microbolometer with the potential for ∼mK NETD;Sensors and Actuators A: Physical;2004-05

2. Integration of sputtered silicon microstructures with pre-fabricated CMOS circuitry;Sensors and Actuators A: Physical;2001-07

3. Fabrication of an electrostatic track-following micro actuator for hard disk drives using SOI wafer;Journal of Micromechanics and Microengineering;2000-11-30

4. A new release process for polysilicon surface micromachining using sacrificial polysilicon anchor and photolithography after sacrificial etching;Journal of Micromechanics and Microengineering;1999-11-30

5. MEMS fabrication of high aspect ratio track-following microactuator for hard disk drive using silicon on insulator;Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291);1999