Author:
Honer Kenneth A,Kovacs Gregory T.A
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. R.T. Howe, R.S. Muller, in: Proceedings of the Extended Abstracts of the Electrochemical Society Meeting, Abstract no. 118, Montreal, Canada, 1982, pp. 184–185.
2. R.T. Howe, R.S. Muller, Integrated resonant-microbridge vapor sensor, in: Proceedings of the International Electron Devices Meeting, Technical Digest, NY, USA, 1984, pp. 213–216.
3. Micromachined inertial sensors;Yazdi;IEEE,1998
4. C. Hierold, et al., Implantable low power integrated pressure sensor system for minimal invasive telemetric patient monitoring, in: Proceedings of the IEEE 11th Annual International Workshop on Micro-electro-mechanical Systems, Heidelberg, Germany, 1998, pp. 568–573.
5. Integration of surface-micromachined polysilicon mirrors and a standard CMOS process;Fischer;Sens. Actuators A: Phys.,1996
Cited by
32 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献