A new release process for polysilicon surface micromachining using sacrificial polysilicon anchor and photolithography after sacrificial etching
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Published:1999-11-30
Issue:4
Volume:9
Page:300-304
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ISSN:0960-1317
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Container-title:Journal of Micromechanics and Microengineering
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language:
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Short-container-title:J. Micromech. Microeng.
Author:
Xiao Zhixiong,Hao Yilong,Li Ting,Zhang Guobing,Liu Shimei,Wu Guoying
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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