Fast 2D hybrid fluid-analytical simulation of inductive/capacitive discharges
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference10 articles.
1. Comparison of model and experiment for Ar, Ar/O2and Ar/O2/Cl2inductively coupled plasmas
2. Modeling electromagnetic effects in capacitive discharges
3. Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions
4. Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2 and Cl number densities
5. Diagnostics of inductively coupled chlorine plasmas: Measurement of electron and total positive ion densities
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2. Fast simulation of the E–H mode transition in Ar/O2 inductively coupled plasmas;Journal of Applied Physics;2023-07-18
3. A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas;Plasma Science and Technology;2023-04-05
4. Investigation of stochastic heating and its influence on plasma radial uniformity in biased inductively coupled Ar discharges by hybrid simulation;Physics of Plasmas;2023-04-01
5. Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code;Plasma Sources Science and Technology;2023-04-01
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