Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.372072
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1. Langmuir probe studies of a transformer-coupled plasma, aluminum etcher
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5. Percent dissociation of Cl2 in inductively coupled, chlorine-containing plasmas
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