Diagnostics of inductively coupled chlorine plasmas: Measurement of electron and total positive ion densities
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1381044
Reference21 articles.
1. Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas
2. Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions
3. Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2 and Cl number densities
4. Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature
5. Laser-induced fluorescence and Langmuir probe determination of Cl2+ and Cl+ absolute densities in transformer-coupled chlorine plasmas
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