Investigation on the parameter distribution of Ar/O2 inductively coupled plasmas-Reference-Cited by-同舟云学术

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Investigation on the parameter distribution of Ar/O2 inductively coupled plasmas

Published:2019-10 Issue: Volume:168 Page:108821
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Han Xinmin,Wei Xiaolong,Xu Haojun,Zhang Wenyuan,Li Yinghui,Li Yiwen,Yang Zixin

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Natural Science Basic Research Program of Shanxi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference30 articles.

1. Three-dimensional computation of reduction in Radar cross section using plasma shielding

2. FDTD simulations on radar cross sections of metal cone and plasma covered metal cone

3. Experimental and theoretical results with plasma antennas

4. Experimental and theoretical characterization of an inductively coupled plasma source

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Preliminary Exploration of Low Frequency Low-Pressure Capacitively Coupled Ar-O2 Plasma;Processes;2024-08-31

2. Improving plasma uniformity in the inductively coupled plasma by external magnetic field;Physics of Plasmas;2024-08-01

3. Computational Study of an Inductively Coupled Plasma with Different Copper Coil Designs and Dielectric Thickness;Russian Journal of Physical Chemistry A;2024-05

4. Numerical simulation of inductively coupled Ar/O<sub>2</sub> plasma;Acta Physica Sinica;2024

5. Real-Time Prediction of Characteristic Parameters of Inductively Coupled Plasma Based on Artificial Neural Network;IEEE Transactions on Plasma Science;2022-10

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