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FDTD simulations on radar cross sections of metal cone and plasma covered metal cone

  • Published:2012-02 Issue:7 Volume:86 Page:970-984
  • ISSN:0042-207X
  • Container-title:Vacuum
  • language:en
  • Short-container-title:Vacuum

Author:

Max Chung Shen Shou

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference32 articles.

1. The propagation of electromagnetic waves in plasma;Ginzburg,1970

2. Radiation and scattering of waves;Felsen,1994

3. Semiconductor manufacturing technology;Quirk,2006

4. Effects of showerhead shapes on the flow fields in a RF-PECVD reactor;Kim;Surf Coat Tech,2005

5. Development of high efficiency large area silicon thin film modules using VHF-PECVD;Takatsuka;Sol En,2004

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