Experimental and theoretical characterization of an inductively coupled plasma source
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1375009
Reference25 articles.
1. Diamond deposition and plasma diagnostics in a 27 MHz inductive coupled reactor (ICP)
2. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
3. Two-dimensional fluid model of high density inductively coupled plasma sources
4. Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study
5. Two-dimensional modeling of high plasma density inductively coupled sources for materials processing
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