Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

Abstract

Abstract Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell (PIC)/Monte Carlo code ECCOPIC2M. The code is verified with three model problems and is validated with results obtained in an earlier experimental work (Sawada et al 2014 Japan. J. Appl. Phys. 53 03DB01). The code shows a good agreement with the experimental data in four cases with various collisionality and absorbed power. It is demonstrated that under the considered parameters, the discharge produces radially uniform ion energy distribution functions for the ions hitting both electrodes. In contrast, ion fluxes exhibit a strong radial nonuniformity, which, however, can be different at the powered and grounded electrodes at increased pressure. It is found that this nonuniformity stems from the nonuniformity of the ionization source, which is in turn shaped by mechanisms leading to the generation of energetic electrons. The mechanisms are caused by the interaction of electrons with the surface waves of two axial electric field symmetry types with respect to the reactor midplane. The asymmetric modes dominate electron heating in the radial direction and produce energetic electrons via the relatively inefficient Ohmic heating mechanism. In the axial direction, the electron energization occurs mainly through an efficient collisionless mechanism caused by the interaction of electrons in the vicinity of an expanding sheath with the sheath motion, which is affected by the excitation of the surface modes of both types. The generation of energetic electron populations as a result of such mechanisms is shown directly. Although some aspects of the underlying physics were demonstrated in the previous literature with other models, the PIC method is advantageous for the predictive modeling due to a complex interplay between the surface mode excitations and the nonlocal physics of the corresponding type of plasma discharges operated at low pressures, which is hard to reproduce in other models realistically.