Estimating the mechanical properties of polyurethane-impregnated felt pads
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://link.springer.com/content/pdf/10.1007/s12206-017-1111-3.pdf
Reference20 articles.
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3. H. Lee, Environmental impact of concentration of slurry components in thick copper CMP, Int. J. Precis. Eng. Manuf.-Green Tech., 4 (1) (2017) 13–18.
4. H. Lee, Mathematical modeling of material removal rate in roll-type linear CMP (Roll-CMP) process: Effect of polishing pad, Int. J. Precis. Eng. Manuf., 17 (4) (2016) 495–501.
5. M. Yuh, S. Jang, H. Kim, H. Lee and H. Jeong, Development of green CMP by slurry reduction through controlling platen coolant temperature, Int. J. Precis. Eng. Manuf.-Green Tech., 2 (4) (2015) 339–344.
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