Dipole Moment Model Explaining nFET V<inf>t</inf> Tuning Utilizing La, Sc, Er, and Sr Doped HfSiON Dielectrics-Reference-Cited by-同舟云学术

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Dipole Moment Model Explaining nFET Vt Tuning Utilizing La, Sc, Er, and Sr Doped HfSiON Dielectrics

Published:2007-06 Issue: Volume: Page:
ISSN:
Container-title:2007 IEEE Symposium on VLSI Technology
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Author:

Sivasubramani P.,Boscke T. S.,Huang J.,Young C. D.,Kirsch P. D.,Krishnan S. A.,Quevedo-Lopez M. A.,Govindarajan S.,Ju B. S.,Harris H. R.,Lichtenwalner D. J.,Jur J. S.,Kingon A. I.,Kim J.,Gnade B. E.,Wallace R. M.,Bersuker G.,Lee B. H.,Jammy R.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4339664/4339665/04339730.pdf?arnumber=4339730

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