Affiliation:
1. Integrated Circuit Advanced Process R&D Center and State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
Funder
National Natural Science Foundation of China
Beijing Natural Science Foundation
Strategic Priority Research Program of Chinese Academy of Sciences
Project Funded by China Postdoctoral Sciences Foundation
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials