Demonstration of Robust Breakdown Reliability and Enhanced Endurance in Gallium Doped HfO2 Ferroelectric Thin Films
Author:
Affiliation:
1. State Key Laboratory of ASIC and Systems, Shanghai Institute of Intelligent Electronics and Systems, School of Microelectronics, Fudan University, Shanghai, China
Funder
National Natural Science Foundation of China
National Key Research and Development Program of China
Shanghai Sailing Program
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/55/10230308/10196667.pdf?arnumber=10196667
Reference25 articles.
1. Si Doped Hafnium Oxide—A “Fragile” Ferroelectric System
2. Ferroelectricity in yttrium-doped hafnium oxide
3. Experimental evidence of ferroelectricity in calcium doped hafnium oxide thin films
4. Lanthanum-Doped Hafnium Oxide: A Robust Ferroelectric Material
5. A review of Ga2O3materials, processing, and devices
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Sub-5nm Al-doped HfO2 ferroelectric thin films compatible with 3D NAND process;Journal of Alloys and Compounds;2024-09
2. Exploring tungsten-oxygen vacancy synergy: Impact on leakage characteristics in Hf0.5Zr0.5O2 ferroelectric thin films;Applied Physics Letters;2024-06-03
3. Enhanced TDDB-Reliability of Ultra-Thin Zirconia Capacitors Featuring Al-Doped Oxide Layers;IEEE Electron Device Letters;2024-06
4. Low Operation Voltage, High-Temperature Reliable, and High-Yield BEOL Integrated Hf₀.₅Zr₀.₅O₂ Ferroelectric Memory Arrays;IEEE Transactions on Electron Devices;2024-06
5. Back-End of Line Compatible Hf0.5Zr0.5O2/ZrO2/Hf0.5Zr0.5O2 Stack Achieving 2P r of 39.6 μC/cm2 and Endurance Exceeding 1010 Cycles under Low-Voltage Operation;IEEE Electron Device Letters;2024
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3