Affiliation:
1. Integrated Circuit Advanced Process R&D Center and State Key Laboratory of Fabrication Technologies for Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
Funder
Strategic Priority Research Program of Chinese Academy of Sciences
National Natural Science Foundation of China
Opening Fund of Key Laboratory of Silicon Device and Technology, Chinese Academy of Sciences
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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