Affiliation:
1. Integrated Circuit Advanced Process R&D Center and Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, China
2. Semiconductor Technology Innovation Center, Beijing, China
Funder
Strategic Pilot Project of the Chinese Academy of Sciences-Class A
Joint Development Program of Semiconductor Technology Innovation Center (Beijing), Corporation
Youth Innovation Promotion Association, Chinese Academy of Sciences
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
9 articles.
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