Finite Element Simulation of Solid–Liquid Interdiffusion Bonding Process: Understanding Process-Dependent Thermomechanical Stress

Author:

Tiwary Nikhilendu1ORCID,Vuorinen Vesa1ORCID,Ross Glenn1ORCID,Paulasto-Krockel Mervi1ORCID

Affiliation:

1. Department of Electrical Engineering and Automation, Aalto University, Otaniemi, Espoo, Finland

Funder

Electronic Components and Systems for European Leadership (ECSEL) Joint Undertaking

Advanced Packaging for Photonics, Optics and Electronics for Low Cost Manufacturing in Europe (APPLAUSE) Project

Innovative Funding Agency Business Finland

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Electronic, Optical and Magnetic Materials

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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2. Investigative characterization of delamination at TiW-Cu interface in low-temperature bonded interconnects;Materials Characterization;2024-03

3. Low-Temperature Wafer-Level Bonding with Cu-Sn-In Solid Liquid Interdiffusion for Microsystem Packaging;Microelectronic Engineering;2024-03

4. Transient Thermodynamic Simulation of Micro LED Array Bonding;2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS);2023-11-27

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