HfO<sub>2</sub>–ZrO<sub>2</sub> Superlattice Ferroelectric Field-Effect Transistor With Improved Endurance and Fatigue Recovery Performance-Reference-Cited by-同舟云学术

HfO₂–ZrO₂ Superlattice Ferroelectric Field-Effect Transistor With Improved Endurance and Fatigue Recovery Performance

Published:2023-07 Issue:7 Volume:70 Page:3979-3982
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Peng Yue¹^ORCID,Xiao Wenwu²^ORCID,Liu Fenning¹,Jin Chengji³^ORCID,Cheng Yan⁴^ORCID,Wang Luhua⁵,Zhang Yueyuan¹,Yu Xiao³^ORCID,Liu Yan¹^ORCID,Hao Yue¹^ORCID,Han Genquan¹^ORCID

Affiliation:

1. School of Microelectronics, Xidian University, Xi’an, China

2. Xi’an UniIC Semiconductors Company Ltd., Xi’an, China

3. Research Center for Intelligent Chips, Zhejiang Laboratory, Hangzhou, China

4. Department of Electronics, Key Laboratory of Polar Materials and Devices (MOE), East China Normal University, Shanghai, China

5. Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Science, Suzhou, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

National Natural Science Foundation of Shaan Xi province

Fundamental Research Funds for the Central Universities

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/16/10159202/10145479.pdf?arnumber=10145479

Reference26 articles.

1. Physical Mechanisms behind the Field-Cycling Behavior of HfO2 -Based Ferroelectric Capacitors

2. Sub-threshold technique for fixed and interface trapped charge separation in irradiated MOSFETs;enlow,1990

3. Electronic Structure Differences in ZrO2 vs HfO2

4. Oxygen diffusion in atomic layer deposited ZrO2 and HfO2 thin films on Si (100)

5. Memory Window and Endurance Improvement of Hf0.5Zr0.5O2-Based FeFETs with ZrO2 Seed Layers Characterized by Fast Voltage Pulse Measurements

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