1. International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu, Taiwan
2. Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu, Taiwan
3. IMEC, Leuven, Belgium
4. Department of Materials Science and Engineering, Department of Electronics Engineering, and the International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu, Taiwan