Wafer Bifurcation as a Spontaneous Symmetry Breaking
Author:
Affiliation:
1. STMicroelectronics,ADG R&D,Catania,Italy,95121
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9758836/9758837/09758915.pdf?arnumber=9758915
Reference14 articles.
1. Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations
2. An introduction to spontaneous symmetry breaking
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