Fabrication of Mach-Zehnder Polymer Waveguides by a Direct-Drawing Technique Using a Focused Proton Beam-Reference-Cited by-同舟云学术

Fabrication of Mach-Zehnder Polymer Waveguides by a Direct-Drawing Technique Using a Focused Proton Beam

Published:2013-01 Issue: Volume:534 Page:158-161
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Miura Kenta¹,Satoh Takahiro²,Ishii Yasuyuki²,Kiryu Hiromu¹,Ozawa Yusuke¹,Kohka Masashi²,Takano Katsuyoshi³,Ohkubo Takeru²,Yamazaki Akiyoshi²,Kada Wataru²,Yokoyama Akihito²,Kamiya Tomihiro²,Hanaizumi Osamu¹

Affiliation:

1. Gunma University

2. Japan Atomic Energy Agency

3. Osaka University

Abstract

Proton beam writing (PBW) has recently attracted much attention as a next-generation microfabrication technology. This is a direct-drawing technique and does not need any masks to transfer micropatterns to sample surfaces. In our previous work, we demonstrated the first single-mode straight-line and Y-junction PMMA-based waveguides fabricated using PBW and working at λ = 1.55 μm. In this work, we fabricated the first PMMA-based Mach-Zehnder waveguides for the wavelength utilizing PBW in order to construct thermo-optic switches.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.534.158.pdf

Reference6 articles.

1. A.A. Bettiol, T.C. Sum, F.C. Cheong, C.H. Sow, S.V. Rao, J.A. van Kan, E.J. Teo, K. Ansari, and F. Watt: Nucl. Instr. and Meth. B Vol. 231 (2005), p.364.

2. F. Watt, M.B.H. Breese, A.A. Bettiol, and J.A. van Kan: Materials Today Vol. 10 (2007), p.20.

3. N. Uchiya, T. Harada, M. Murai, H. Nishikawa, J. Haga, T. Sato, Y. Ishii, and T. Kamiya: Nucl. Instr. and Meth. B Vol. 260 (2007), p.405.

4. I. Rajta, S.Z. Szilasi, J. Budai, Z. Tóth, P. Petrik, and E. Baradács: Nucl. Instr. and Meth. B Vol. 260 (2007), p.400.

5. K. Miura, Y. Machida, M. Uehara, H. Kiryu, T. Sasaki, O. Hanaizumi, T. Satoh, Y. Ishii, M. Kohka, K. Takano, T. Ohkubo, A. Yamazaki, W. Kada, A. Yokoyama, T. Kamiya, and H. Nishikawa: Key Engineering Materials Vol. 497 (2012), p.147.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Beam Diameter Reduction by Optimization of an Extraction Condition in a Compact Ion Microbeam System;Physics Procedia;2017

2. Fabrication and evaluation of flexible Mach–Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam;Japanese Journal of Applied Physics;2016-05-20

3. Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04

4. Demonstration of Thermo-Optic Switch Consisting of Mach-Zehnder Polymer Waveguide Drawn Using Focused Proton Beam;Key Engineering Materials;2013-12