Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing-Reference-Cited by-同舟云学术

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Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing

Published:2015-04 Issue: Volume:348 Page:218-222
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Kada W.,Miura K.,Kato H.,Saruya R.,Kubota A.,Satoh T.,Koka M.,Ishii Y.,Kamiya T.,Nishikawa H.,Hanaizumi O.

Funder

MEXT/JSPS

Iketani Science and Technology Foundation

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference30 articles.

1. High‐resolution, ion‐beam processes for microstructure fabrication

2. Resist materials for proton micromachining

3. Resist materials for proton beam writing: A review

4. Ni electroplating on a resist micro-machined by proton beam writing

5. Three-dimensional nanolithography using proton beam writing

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Refractive index change and thermo-optic effect in polydimethylsiloxane nanocomposites with oxide nanoparticles induced by proton beam writing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-11

2. Fabrication of Two-Dimensional Arrays of Fluorescent Centers in Single-Crystalline Diamond Using Particle Beam Writing;Key Engineering Materials;2018-11

3. Two-photon excited microscale colour centre patterns in Ag-activated phosphate glass written using a focused proton beam;Japanese Journal of Applied Physics;2017-11-28

4. Micro-structuring of epoxy resists containing nanoparticles by proton beam writing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-08

5. The evaluation of the refractive indices of bulk and thick polydimethylsiloxane and polydimethyl-diphenylsiloxane elastomers by the prism coupling technique;Journal of Materials Science: Materials in Electronics;2017-02-08

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